Studying Nanocomposite Films with a Matrix-Forming Carbon by Kelvin Probe Force Microscopy

A. P. Rubshtein; Yu. V. Korkh; A. B. Vladimirov; A. B. Rinkevich; S. A. Plotnikov

doi:10.17804/2410-9908.2015.6.104-113

A. P. Rubshtein, Yu. V. Korkh, A. B. Vladimirov, A. B. Rinkevich, S. A. Plotnikov

STUDYING NANOCOMPOSITE FILMS WITH A MATRIX-FORMING CARBON BY KELVIN PROBE FORCE MICROSCOPY

DOI: 10.17804/2410-9908.2015.6.104-113

Nanocomposite TiC/a-C and diamond-like carbon a-C films obtained by vacuum ion-plasma method have been studied by Kelvin Probe force microscopy. Films of thickness 200 nm were deposited on silicon wafers. The structure and composition of nanocomposite TiC/a-C films were varied by deposition conditions. It is shown that the average surface potential V_SP^av depends on the pulse frequency of graphite target sputtering during film deposition. Amount of sp³ bonded carbon on the film surface increases with scale up frequency. The V_SP^av of TiC/a-C nanocomposite films depends on phase composition (Ti, TiC, a-C) and their ratio. The numerical calculated volume fractions of the phases in the TiC/a-C films correlates with V_SP^av.

Keywords: nanocomposite films, diamond-like carbon, titanium carbide, Kelvin probe force microscopy, average surface potential

References:

Robertson J. Diamond-like amorphous carbon. Materials Science and Engineering: R: Reports, 2002, vol. 37, iss. 4–6, pp. 129–281. DOI: 10.1016/S0927-796X(02)00005-0.
Rubstein A.P., Makarova E.B., Trakhtenberg I.Sh., Kudryavtseva I.P., Bliznets D.G., Philippov Yu.I., Shlykov I.L. Osseointegration of porous titanium modified by diamond-like carbon and carbon nitride. Diamond and Related Materials, 2012, vol. 22, pp. 128–135. DOI: 10.1016/j.diamond.2011.12.030.
Trakhtenberg I.Sh., Vladimirov A.B., Plotnikov S.A., Rubshtein A.P., Vykhodets V.B., Bakunin O.M. Effect of adhesion strength of DLC to steel on the coating erosion mechanism. Diamond and Related Materials, 2001, vol. 10, iss. 9–10, pp. 1824–1828. DOI: 10.1016/S0925-9635(01)00430-7.
Musil J. Hard and superhard nanocomposite coatings. Surface and Coatings Technology, 2000, vol. 125, iss. 1–3, pp. 322–330. DOI: 10.1016/S0257-8972(99)00586-1.
Veprek S., Veprek-Heijman Maritza G.J., Karvankova P., Prochazka J. Different approaches to superhard coatings and nanocomposites. Thin Solid Films, 2005, vol. 476, iss. 1, pp. 1–29. DOI: 10.1016/j.tsf.2004.10.053.
Yang Q., Zhao L.R. Microstructure, mechanical and tribological properties of novel multicomponent nanolayered nitride coatings. Surface and Coatings Technology, 2005, vol. 200, iss. 5–6, pp. 1709–1713. DOI: 10.1016/j.surfcoat.2005.08.087.
Dai W., Ke P., Moon M.W., Lee K.R., Wang A. Investigation of the microstructure, mechanical properties and tribological behaviors of Ti-containing diamond-like carbon ilms fabricated by a hybrid ion beam method. Thin Solid Films, 2012, vol. 520, iss. 19, pp. 6057–6063. DOI: 10.1016/j.tsf.2012.04.016.
Guo J., Hu X.J., Lu Y.H., Shen Y.G. Microstructure Evolution of nc-TiN/a-(C, CNx) Nanocomposite Films with Different Amorphous Phase Amounts. Procedia Engineering, 2013, vol. 67, pp. 388–396. DOI: 10.1016/j.proeng.2013.12.038.
Gulbinski W., Mathur S., Shen H., Suszko T., Gilewicz A., Warcholinski B. Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering. Applied Surface Science, 2005, vol. 239, iss. 3–4, pp. 302–310. DOI: 10.1016/j.apsusc.2004.05.278.
Foong Y.M., Koh A.T.T., Lim S.R., Hsieh J., Chua D.H.C. Materials properties of ZnO/diamond-like carbon (DLC) nanocomposite fabricated with different source of targets. Diamond and Related Materials, 2012, vol. 25, pp. 103–110. DOI: 10.1016/j.diamond.2012.02.018.
Zhang S., Bui X.L., Jiang J., Li X. Microstructure and tribological properties of magnetron sputtered nc-TiC/a-C nanocomposite. Surface and Coatings Technology, 2005, vol. 198, iss. 1–3, pp. 206–211. DOI: 10.1016/j.surfcoat.2004.10.041.
Melitz W., Shen J., Kummel A.C., Lee S. Kelvin probe force microscopy and its application. Surface Science Reports, 2011, vol. 66, iss. 1, pp. 1–27. DOI: 10.1016/j.surfrep.2010.10.001.
Nonnenmacher M., O’Boyle M.P., Wickramasinghe H.K. Kelvin probe force microscopy. Applied Physics Letters, 1991, vol. 58, iss. 25, pp. 2921–2923. DOI: 10.1063/1.105227.
Trakhtenberg I.Sh., Gavrilov N.V., Emlin D.R., Plotnikov S.A., Vladimirov A.B., Volkova E.G., Rubshtein A.P. Nanocomposite vacuum-arc TiC/a-C:H coatings prepared using an additional ionization of acetylene. The Physics of Metals and Metallography, 2014, vol. 115, iss. 7, pp. 723–729. DOI: 10.1134/S0031918X14070102.
Trakhtenberg I.Sh., Vladimirov A.B., Rubstein A.P., Kuzmina E.V., Uemura K., Gontar A.G., Dub S.N. The analysis of microhardness measurement approach for characterization of hard coatings. Diamond and Related Materials, 2003, vol. 12, iss. 10–11, pp. 1788–1792. DOI: 10.1016/S0925-9635(03)00288-7.
Trakhtenberg I.Sh., Rubshtein A.P., Vladimirov A.B., Yugov V.A., Plotnikov S.A., Volkova E.G. Formation of morphology of surface of diamond-like films condenced upon arc deposition of graphite in a vacuum. The Physics of Metals and Metallography, 2005, vol. 100, iss. 1, pp. 56–60.
Xie W.G., Chen J., Chen J., Deng S.Z., She J.C., Xu N.S. Effect of hydrogen treatment on the field emission of amorphous carbon film. Journal of Applied Physics, 2007, vol. 101, iss. 8, pp. 084315-084500. DOI: 10.1063/1.2724426.
Ilie A., Hart A., Flewitt J., Robertson J., Milne W.I. Effect of work function and surface microstructure on field emission of tetrahedral amorphous carbon. Journal of Applied Physics, 2000, vol. 88, iss. 10, pp. 6002–6010. DOI: 10.1063/1.1314874.

А. П. Рубштейн, Ю. В. Корх, А. Б. Владимиров, А. Б. Ринкевич, С. А. Плотников

ИССЛЕДОВАНИЕ НАНОКОМПОЗИТНЫХ ПЛЕНОК С МАТРИЦЕОБРАЗУЮЩИМ УГЛЕРОДОМ МЕТОДОМ ЗОНДА КЕЛЬВИНА

Методом зонда Кельвина изучены нанокомпозитные TiC/a-C пленки и алмазоподобные углеродные а-С, полученные вакуумным ионно-плазменным методом. Пленки толщиной 200 нм осаждались на кремниевые пластины. Структура и состав нанокомпозитных TiC/a-C пленок варьировались условиями осаждения. Показано, что средней средний потенциал поверхности V_ПП^ср а-С пленок зависит от частоты импульсов распыления графитовой мишени. При повышенной частоте количество sp³ связанного углерода на поверхности пленки возрастает. Установлена зависимость V_ПП^ср TiC/a-C пленок от фазового состава (Ti, TiC, a-C) и их соотношения. Найдена корреляция между V_ПП^ср и расчетными объемными долями фаз в TiC/a-C пленках.

Ключевые слова: нанокомпозитные пленки, алмазоподобный углерод, карбид титана, метод зонда Кельвина, средний потенциал поверхности

Библиография:

Robertson J. Diamond-like amorphous carbon // Materials Science and Engineering R. – 2002. – Vol. 37, iss. 4–6. – P. 129–281. – DOI: 10.1016/S0927-796X(02)00005-0.
Osseointegration of porous titanium modified by diamond-like carbon and carbon nitride / P. Rubstein, E. B. Makarova, I. Sh. Trakhtenberg, I. P. Kudryavtseva, D. G. Bliznets, Yu. I. Philippov, I. L. Shlykov // Diamond and Related Materials. – 2012. – Vol. 22. – P. 128–135. DOI: 10.1016/j.diamond.2011.12.030.
Effect of adhesion strength of DLC to steel on the coating erosion mechanism / Sh. Trakhtenberg, A. B. Vladimirov, S. A. Plotnikov, A. P. Rubshtein, V. B. Vykhodets, O. M. Bakunin // Diamond and Related Materials. – 2001. – Vol. 10, iss. 9–10. – P. 1824–1828. – DOI: 10.1016/S0925-9635(01)00430-7.
Musil J. Hard and nanocomposite coatings // Surface and Coatings Technology. – 2000. – Vol. 125, iss. 1–3. – P. 322–330. – DOI: 10.1016/S0257-8972(99)00586-1.
Different approaches to superhard coatings and nanocomposites / S. Veprek, M. G. J. Veprek-Heijman, P. Karvankova, J. Prochazka // Thin Solid Films. – 2005. – Vol. 476, iss. 1. – P. 1–29. – DOI: 10.1016/j.tsf.2004.10.053.
Yang Q., Zhao L. R. Microstructure, mechanical and tribological properties of novel multicomponent nanolayered nitride coatings // Surface and Coatings Technology. – 2005. – Vol. 200, iss. 5–6. – P. 1709–1713. – DOI: 10.1016/j.surfcoat.2005.08.087.
Investigation of the microstructure, mechanical properties and tribological behaviors of Ticontaining diamond-like carbon films fabricated by a hybrid ion beam method / W. Dai, P. Ke, M. W. Moon, K. R. Lee, A. Wang // Thin Solid Films. – 2012. – Vol. 520, iss. 19. – P. 6057–6063. DOI: 10.1016/j.tsf.2012.04.016.
Microstructure Evolution of nc-TiN/a-(C, CNx) Nanocomposite Films with Different Amorphous Phase Amounts / J. Guo, X. J. Hu, Y. H. Lu, Y. G. Shen // Procedia Engineering. – 2013. – Vol. 67. – P. 388–396. – DOI: 10.1016/j.proeng.2013.12.038.
Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering / W. Gulbinski, S. Mathur, H. Shen, T. Suszko, A. Gilewicz, B. Warcholinski // Applied Surface Science. – 2005. – Vol. 239, iss. 3–4. – P. 302–310. – DOI: 10.1016/j.apsusc.2004.05.278.
Materials properties of ZnO/diamond-like carbon (DLC) nanocomposite fabricated with different source of targets / Y. M. Foong, A. T. T. Koh, S. R. Lim, J. Hsieh, D. H. C. Chua // Diamond and Related Materials. – 2012. – Vol. 25. – P. 103–110. – DOI: 10.1016/j.diamond.2012.02.018.
Microstructure and tribological properties of magnetron sputtered nc-TiC/a-C nanocomposite / S. Zhang, X. L. Bui, J. Jiang, X. Li // Surface and Coatings Technology. – 2005. – Vol. 198, iss. 1–3. – P. 206–211. – DOI: 10.1016/j.surfcoat.2004.10.041.
Kelvin probe force microscopy and its application / W. Melitz, J. Shen, A. C. Kummel, S. Lee // Surface Science Reports. – 2011. – Vol. 66, iss. 1. – P. 1–27. – DOI: 10.1016/j.surfrep.2010.10.001.
Nonnenmacher M., O’Boyle M. P., Wickramasinghe H. K. Kelvin probe force microscopy // Applied Physics Letters. – 1991. – Vol. 58, iss. 25. – P. 2921–2923. – DOI: 10.1063/1.105227.
Nanocomposite vacuum-arc TiC/a-C:H coatings prepared using an additional ionization of acetylene / I. Sh. Trakhtenberg, N. V. Gavrilov, D. R. Emlin, S. A. Plotnikov, A. B. Vladimirov, E. G. Volkova, A. P. Rubshtein // The Physics of Metals and Metallography. – 2014. – Vol. 115, iss. 7. – P. 723–729. – DOI: 10.1134/S0031918X14070102.
The analysis of microhardness measurement approach for characterization of hard coatings / Sh. Trakhtenberg, A. B. Vladimirov, A. P. Rubstein, E. V. Kuzmina, K. Uemura, A. G. Gontar, S. N. Dub // Diamond and Related Materials. – 2003. – Vol. 12, iss. 10–11. – P. 1788–1792. – DOI: 10.1016/S0925-9635Ž03.00288-7.
Formation of morphology of surface of diamond-like films condenced upon arc deposition of graphite in a vacuum / I. Sh. Trakhtenberg, A. P. Rubshtein, A. B. Vladimirov, V. A. Yugov, S. A. Plotnikov, E. G. Volkova // The Physics of Metals and Metallography. – 2005. – Vol. 100, iss. 1. – P. 56–60.
Effect of hydrogen treatment on the field emission of amorphous carbon film / W. G. Xie, J. Chen, J. Chen, S. Z. Deng, J. C. She, N. S. Xu // Journal of Applied Physics. – 2007. – Vol. 101, iss. 8. – P. 084315–084500. – DOI: 10.1063/1.2724426.
Effect of work function and surface microstructure on field emission of tetrahedral amorphous carbon / A. Ilie, A. Hart, J. Flewitt, J. Robertson, W. I. Milne // Journal of Applied Physics. – 2000. – Vol. 88, iss. 10. – P. 6002–6010. – DOI: 10.1063/1.1314874.

Библиографическая ссылка на статью

Studying Nanocomposite Films with a Matrix-Forming Carbon by Kelvin Probe Force Microscopy / A. P. Rubshtein, Yu. V. Korkh, A. B. Vladimirov, A. B. Rinkevich, S. A. Plotnikov // Diagnostics, Resource and Mechanics of materials and structures. - 2015. - Iss. 6. - P. 104-113. -
DOI: 10.17804/2410-9908.2015.6.104-113. -
URL: http://dream-journal.org/issues/2015-6/2015-6_60.html
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