Studying Nanocomposite Films with a Matrix-Forming Carbon by Kelvin Probe Force Microscopy

A. P. Rubshtein; Yu. V. Korkh; A. B. Vladimirov; A. B. Rinkevich; S. A. Plotnikov

doi:10.17804/2410-9908.2015.6.104-113

A. P. Rubshtein, Yu. V. Korkh, A. B. Vladimirov, A. B. Rinkevich, S. A. Plotnikov

STUDYING NANOCOMPOSITE FILMS WITH A MATRIX-FORMING CARBON BY KELVIN PROBE FORCE MICROSCOPY

DOI: 10.17804/2410-9908.2015.6.104-113

Nanocomposite TiC/a-C and diamond-like carbon a-C films obtained by vacuum ion-plasma method have been studied by Kelvin Probe force microscopy. Films of thickness 200 nm were deposited on silicon wafers. The structure and composition of nanocomposite TiC/a-C films were varied by deposition conditions. It is shown that the average surface potential V_SP^av depends on the pulse frequency of graphite target sputtering during film deposition. Amount of sp³ bonded carbon on the film surface increases with scale up frequency. The V_SP^av of TiC/a-C nanocomposite films depends on phase composition (Ti, TiC, a-C) and their ratio. The numerical calculated volume fractions of the phases in the TiC/a-C films correlates with V_SP^av.

Keywords: nanocomposite films, diamond-like carbon, titanium carbide, Kelvin probe force microscopy, average surface potential

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А. П. Рубштейн, Ю. В. Корх, А. Б. Владимиров, А. Б. Ринкевич, С. А. Плотников

ИССЛЕДОВАНИЕ НАНОКОМПОЗИТНЫХ ПЛЕНОК С МАТРИЦЕОБРАЗУЮЩИМ УГЛЕРОДОМ МЕТОДОМ ЗОНДА КЕЛЬВИНА

Методом зонда Кельвина изучены нанокомпозитные TiC/a-C пленки и алмазоподобные углеродные а-С, полученные вакуумным ионно-плазменным методом. Пленки толщиной 200 нм осаждались на кремниевые пластины. Структура и состав нанокомпозитных TiC/a-C пленок варьировались условиями осаждения. Показано, что средней средний потенциал поверхности V_ПП^ср а-С пленок зависит от частоты импульсов распыления графитовой мишени. При повышенной частоте количество sp³ связанного углерода на поверхности пленки возрастает. Установлена зависимость V_ПП^ср TiC/a-C пленок от фазового состава (Ti, TiC, a-C) и их соотношения. Найдена корреляция между V_ПП^ср и расчетными объемными долями фаз в TiC/a-C пленках.

Ключевые слова: нанокомпозитные пленки, алмазоподобный углерод, карбид титана, метод зонда Кельвина, средний потенциал поверхности

Библиография:

Robertson J. Diamond-like amorphous carbon // Materials Science and Engineering R. – 2002. – Vol. 37, iss. 4–6. – P. 129–281. – DOI: 10.1016/S0927-796X(02)00005-0.
Osseointegration of porous titanium modified by diamond-like carbon and carbon nitride / P. Rubstein, E. B. Makarova, I. Sh. Trakhtenberg, I. P. Kudryavtseva, D. G. Bliznets, Yu. I. Philippov, I. L. Shlykov // Diamond and Related Materials. – 2012. – Vol. 22. – P. 128–135. DOI: 10.1016/j.diamond.2011.12.030.
Effect of adhesion strength of DLC to steel on the coating erosion mechanism / Sh. Trakhtenberg, A. B. Vladimirov, S. A. Plotnikov, A. P. Rubshtein, V. B. Vykhodets, O. M. Bakunin // Diamond and Related Materials. – 2001. – Vol. 10, iss. 9–10. – P. 1824–1828. – DOI: 10.1016/S0925-9635(01)00430-7.
Musil J. Hard and nanocomposite coatings // Surface and Coatings Technology. – 2000. – Vol. 125, iss. 1–3. – P. 322–330. – DOI: 10.1016/S0257-8972(99)00586-1.
Different approaches to superhard coatings and nanocomposites / S. Veprek, M. G. J. Veprek-Heijman, P. Karvankova, J. Prochazka // Thin Solid Films. – 2005. – Vol. 476, iss. 1. – P. 1–29. – DOI: 10.1016/j.tsf.2004.10.053.
Yang Q., Zhao L. R. Microstructure, mechanical and tribological properties of novel multicomponent nanolayered nitride coatings // Surface and Coatings Technology. – 2005. – Vol. 200, iss. 5–6. – P. 1709–1713. – DOI: 10.1016/j.surfcoat.2005.08.087.
Investigation of the microstructure, mechanical properties and tribological behaviors of Ticontaining diamond-like carbon films fabricated by a hybrid ion beam method / W. Dai, P. Ke, M. W. Moon, K. R. Lee, A. Wang // Thin Solid Films. – 2012. – Vol. 520, iss. 19. – P. 6057–6063. DOI: 10.1016/j.tsf.2012.04.016.
Microstructure Evolution of nc-TiN/a-(C, CNx) Nanocomposite Films with Different Amorphous Phase Amounts / J. Guo, X. J. Hu, Y. H. Lu, Y. G. Shen // Procedia Engineering. – 2013. – Vol. 67. – P. 388–396. – DOI: 10.1016/j.proeng.2013.12.038.
Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering / W. Gulbinski, S. Mathur, H. Shen, T. Suszko, A. Gilewicz, B. Warcholinski // Applied Surface Science. – 2005. – Vol. 239, iss. 3–4. – P. 302–310. – DOI: 10.1016/j.apsusc.2004.05.278.
Materials properties of ZnO/diamond-like carbon (DLC) nanocomposite fabricated with different source of targets / Y. M. Foong, A. T. T. Koh, S. R. Lim, J. Hsieh, D. H. C. Chua // Diamond and Related Materials. – 2012. – Vol. 25. – P. 103–110. – DOI: 10.1016/j.diamond.2012.02.018.
Microstructure and tribological properties of magnetron sputtered nc-TiC/a-C nanocomposite / S. Zhang, X. L. Bui, J. Jiang, X. Li // Surface and Coatings Technology. – 2005. – Vol. 198, iss. 1–3. – P. 206–211. – DOI: 10.1016/j.surfcoat.2004.10.041.
Kelvin probe force microscopy and its application / W. Melitz, J. Shen, A. C. Kummel, S. Lee // Surface Science Reports. – 2011. – Vol. 66, iss. 1. – P. 1–27. – DOI: 10.1016/j.surfrep.2010.10.001.
Nonnenmacher M., O’Boyle M. P., Wickramasinghe H. K. Kelvin probe force microscopy // Applied Physics Letters. – 1991. – Vol. 58, iss. 25. – P. 2921–2923. – DOI: 10.1063/1.105227.
Nanocomposite vacuum-arc TiC/a-C:H coatings prepared using an additional ionization of acetylene / I. Sh. Trakhtenberg, N. V. Gavrilov, D. R. Emlin, S. A. Plotnikov, A. B. Vladimirov, E. G. Volkova, A. P. Rubshtein // The Physics of Metals and Metallography. – 2014. – Vol. 115, iss. 7. – P. 723–729. – DOI: 10.1134/S0031918X14070102.
The analysis of microhardness measurement approach for characterization of hard coatings / Sh. Trakhtenberg, A. B. Vladimirov, A. P. Rubstein, E. V. Kuzmina, K. Uemura, A. G. Gontar, S. N. Dub // Diamond and Related Materials. – 2003. – Vol. 12, iss. 10–11. – P. 1788–1792. – DOI: 10.1016/S0925-9635Ž03.00288-7.
Formation of morphology of surface of diamond-like films condenced upon arc deposition of graphite in a vacuum / I. Sh. Trakhtenberg, A. P. Rubshtein, A. B. Vladimirov, V. A. Yugov, S. A. Plotnikov, E. G. Volkova // The Physics of Metals and Metallography. – 2005. – Vol. 100, iss. 1. – P. 56–60.
Effect of hydrogen treatment on the field emission of amorphous carbon film / W. G. Xie, J. Chen, J. Chen, S. Z. Deng, J. C. She, N. S. Xu // Journal of Applied Physics. – 2007. – Vol. 101, iss. 8. – P. 084315–084500. – DOI: 10.1063/1.2724426.
Effect of work function and surface microstructure on field emission of tetrahedral amorphous carbon / A. Ilie, A. Hart, J. Flewitt, J. Robertson, W. I. Milne // Journal of Applied Physics. – 2000. – Vol. 88, iss. 10. – P. 6002–6010. – DOI: 10.1063/1.1314874.

Библиографическая ссылка на статью

Studying Nanocomposite Films with a Matrix-Forming Carbon by Kelvin Probe Force Microscopy / A. P. Rubshtein, Yu. V. Korkh, A. B. Vladimirov, A. B. Rinkevich, S. A. Plotnikov // Diagnostics, Resource and Mechanics of materials and structures. - 2015. - Iss. 6. - P. 104-113. -
DOI: 10.17804/2410-9908.2015.6.104-113. -
URL: http://dream-journal.org/issues/2015-6/2015-6_60.html
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